Ultralow-voltage electrothermal MEMS based fiber-optic scanning probe for forward-viewing endoscopic OCT

Hyeon Cheol Park, Xiaoyang Zhang, Wu Yuan, Liang Zhou, Huikai Xie, Xingde Li

Research output: Contribution to journalArticle

Abstract

We report an ultralow-voltage, electrothermal (ET) micro-electro-mechanical system (MEMS) based probe for forward-viewing endoscopic optical coherence tomography (OCT) imaging. The fully assembled probe has a diameter of 5.5 mm and a length of 55 mm, including the imaging optics and a 40 mm long fiber-optic cantilever attached on a micro-platform of the bimorph ET MEMS actuator. The ET MEMS actuator provides a sufficient mechanical actuation force as well as a large vertical displacement, achieving up to a 3 mm optical scanning range with only a 3 V ACp p drive voltage with a 1.5 V DC offset. The imaging probe was integrated with a swept-source OCT system of a 100 kHz A-scan rate, and its performance was successfully demonstrated with cross-sectional imaging of biological tissues ex vivo and in vivo at a speed up to 200 frames per second.

Original languageEnglish (US)
Pages (from-to)2232-2235
Number of pages4
JournalOptics Letters
Volume44
Issue number9
DOIs
StatePublished - May 1 2019

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fiber optics
tomography
scanning
probes
electric potential
actuators
actuation
platforms
direct current
optics

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Ultralow-voltage electrothermal MEMS based fiber-optic scanning probe for forward-viewing endoscopic OCT. / Park, Hyeon Cheol; Zhang, Xiaoyang; Yuan, Wu; Zhou, Liang; Xie, Huikai; Li, Xingde.

In: Optics Letters, Vol. 44, No. 9, 01.05.2019, p. 2232-2235.

Research output: Contribution to journalArticle

Park, Hyeon Cheol ; Zhang, Xiaoyang ; Yuan, Wu ; Zhou, Liang ; Xie, Huikai ; Li, Xingde. / Ultralow-voltage electrothermal MEMS based fiber-optic scanning probe for forward-viewing endoscopic OCT. In: Optics Letters. 2019 ; Vol. 44, No. 9. pp. 2232-2235.
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