Ultralow-voltage electrothermal MEMS based fiber-optic scanning probe for forward-viewing endoscopic OCT

Hyeon Cheol Park, Xiaoyang Zhang, Wu Yuan, Liang Zhou, Huikai Xie, Xingde Li

Research output: Contribution to journalArticle


We report an ultralow-voltage, electrothermal (ET) micro-electro-mechanical system (MEMS) based probe for forward-viewing endoscopic optical coherence tomography (OCT) imaging. The fully assembled probe has a diameter of 5.5 mm and a length of 55 mm, including the imaging optics and a 40 mm long fiber-optic cantilever attached on a micro-platform of the bimorph ET MEMS actuator. The ET MEMS actuator provides a sufficient mechanical actuation force as well as a large vertical displacement, achieving up to a 3 mm optical scanning range with only a 3 V ACp p drive voltage with a 1.5 V DC offset. The imaging probe was integrated with a swept-source OCT system of a 100 kHz A-scan rate, and its performance was successfully demonstrated with cross-sectional imaging of biological tissues ex vivo and in vivo at a speed up to 200 frames per second.

Original languageEnglish (US)
Pages (from-to)2232-2235
Number of pages4
JournalOptics Letters
Issue number9
StatePublished - May 1 2019


ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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