@inproceedings{d973a94bf7e741c58ea9bf409353d6d1,
title = "Traveling wave annular ultrasonic micromotors using bulk PZT",
abstract = "This paper describes the development a novel traveling wave ultrasonic micromotor fabricated directly from low-cost and high-performance bulk piezoceramic PZT. We report a simpler approach to realizing traveling wave ultrasonic micromotors in which traveling waves are generated within a tethered annular stator microfabricated from a single sheet of bulk PZT. Actuation is achieved using interdigitated electrodes deposited on a single layer, enabling monolithic stators to be fabricated in a batch process from a single sheet of high quality bulk piezoceramic. The process requires only 2 photolithography steps, greatly simplifying design and manufacture while improving device performance and microfabrication costs.",
keywords = "Micromotors, piezoelectric transducers, stators, ultrasonic transducers",
author = "Prakruthi Hareesh and Shuang Yang and Devoe, {Don L.}",
year = "2012",
month = jun,
day = "1",
doi = "10.1109/MAMNA.2012.6195092",
language = "English (US)",
isbn = "9781467317818",
series = "MAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation",
booktitle = "MAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation",
note = "2012 Spring Symposium on Microsystems for Measurement and Instrumentation, MAMNA 2012 ; Conference date: 27-03-2012 Through 27-03-2012",
}