Traveling wave annular ultrasonic micromotors using bulk PZT

Prakruthi Hareesh, Shuang Yang, Don L. Devoe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes the development a novel traveling wave ultrasonic micromotor fabricated directly from low-cost and high-performance bulk piezoceramic PZT. We report a simpler approach to realizing traveling wave ultrasonic micromotors in which traveling waves are generated within a tethered annular stator microfabricated from a single sheet of bulk PZT. Actuation is achieved using interdigitated electrodes deposited on a single layer, enabling monolithic stators to be fabricated in a batch process from a single sheet of high quality bulk piezoceramic. The process requires only 2 photolithography steps, greatly simplifying design and manufacture while improving device performance and microfabrication costs.

Original languageEnglish (US)
Title of host publicationMAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation
DOIs
StatePublished - Jun 1 2012
Event2012 Spring Symposium on Microsystems for Measurement and Instrumentation, MAMNA 2012 - Annapolis, MD, United States
Duration: Mar 27 2012Mar 27 2012

Publication series

NameMAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation

Other

Other2012 Spring Symposium on Microsystems for Measurement and Instrumentation, MAMNA 2012
CountryUnited States
CityAnnapolis, MD
Period3/27/123/27/12

Keywords

  • Micromotors
  • piezoelectric transducers
  • stators
  • ultrasonic transducers

ASJC Scopus subject areas

  • Control and Systems Engineering

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  • Cite this

    Hareesh, P., Yang, S., & Devoe, D. L. (2012). Traveling wave annular ultrasonic micromotors using bulk PZT. In MAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation [6195092] (MAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation). https://doi.org/10.1109/MAMNA.2012.6195092