The chemistry of recoiling silicon atoms. V. Product-forming reactions in phosphine-silane mixtures

Physics & Astronomy

• phosphines 77%
• recoilings 74%
• silanes 61%
• chemistry 48%
• products 36%
• silicon 30%
• atoms 28%
• insertion 10%
• nitric oxide 6%
• binary mixtures 5%
• dissociation 4%
• kinetics 3%

Chemical Compounds

• Product-Determining Step 100%
• Silicon Atom 66%
• Silane 53%
• Disilane 39%
• Phosphine 25%
• Mixture 24%
• Dissociation 20%
• Oxide 15%

Engineering & Materials Science

• Silanes 72%
• Atoms 58%
• Silicon 44%
• Nitric oxide 19%
• Binary mixtures 18%
• Experiments 10%