Abstract
The surface structures of thin erbium silicide layers formed on Si(1 0 0) substrate by solid phase epitaxy are studied by using the in situ high energy electron diffraction, low energy electron diffraction, Auger electron spectroscopy, scanning tunneling microscopy, and ex situ grazing X-ray diffraction. Nanowires and nanoislands of Er silicide coexist on the Si substrate surface and a c(2 × 2) reconstruction is observed on the top of these nanostructures. The crystalline structure of the Er silicide nanostructure is found to be tetragonal ErSi2. A Si-adatom model for the c(2 × 2) reconstruction is proposed. The total energy calculation based on the discrete-variational self-consistent multipolar cluster method identifies that the hollow site Si adatom model might be the most energetically favorable one.
Original language | English (US) |
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Pages (from-to) | 203-210 |
Number of pages | 8 |
Journal | Surface Science |
Volume | 513 |
Issue number | 1 |
DOIs | |
State | Published - Jul 2002 |
Externally published | Yes |
Keywords
- Epitaxy
- Lanthanides
- Metal-semiconductor interfaces
- Silicides
- Surface energy
- Surface relaxation and reconstruction
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry