Short coherence dynamic Fizeau interferometer with internal path matching for radius of curvature measurement

Michael North Morris, Eric Frey

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

One of the most time-consuming aspects of measuring the radius of curvature of a test article is repeatedly moving between the cateye and confocal positions for stage readings and measurements. Here we introduce a unique short coherence dynamic Fizeau interferometer with internal path matching that facilitates long term stability of the cateye reference position relative to the confocal position, eliminating the need to take repeated cateye measurements. The path matching assembly is equipped with a high-quality encoder and has an athermalized design for long-term stability of the path match locations. In addition, the interferometer uses a polarization based pixelated camera for single frame acquisition of the measurements. Combined with the short coherence source, the single frame measurements facilitate rapid scans of the fringe modulation as a function of stage position for accurately locating the relative position of the test article along the optical axis. Radius of curvature measurement repeatability of less than a micron has been demonstrated. This paper will discuss the theory of operation and present the results of measurement studies.

Original languageEnglish (US)
Title of host publicationInterferometry XIX
EditorsKatherine Creath, Jan Burke, Angela D. Davies, Michael B. North Morris, Katherine Creath
PublisherSPIE
Volume10749
ISBN (Electronic)9781510620698
DOIs
StatePublished - Jan 1 2018
Externally publishedYes
EventInterferometry XIX 2018 - San Diego, United States
Duration: Aug 21 2018Aug 23 2018

Other

OtherInterferometry XIX 2018
CountryUnited States
CitySan Diego
Period8/21/188/23/18

Fingerprint

Fizeau Interferometer
Radius of curvature
Interferometers
interferometers
curvature
Internal
Path
radii
Confocal
Repeated Measurements
Repeatability
Encoder
Interferometer
Modulation
Polarization
Camera
coders
Cameras
acquisition
assembly

Keywords

  • Dynamic Interferometer
  • Fizeau
  • Interferometry
  • Micro-Polarizer
  • Radius of Curvature
  • Short Coherence

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

North Morris, M., & Frey, E. (2018). Short coherence dynamic Fizeau interferometer with internal path matching for radius of curvature measurement. In K. Creath, J. Burke, A. D. Davies, M. B. North Morris, & K. Creath (Eds.), Interferometry XIX (Vol. 10749). [1074910] SPIE. https://doi.org/10.1117/12.2322556

Short coherence dynamic Fizeau interferometer with internal path matching for radius of curvature measurement. / North Morris, Michael; Frey, Eric.

Interferometry XIX. ed. / Katherine Creath; Jan Burke; Angela D. Davies; Michael B. North Morris; Katherine Creath. Vol. 10749 SPIE, 2018. 1074910.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

North Morris, M & Frey, E 2018, Short coherence dynamic Fizeau interferometer with internal path matching for radius of curvature measurement. in K Creath, J Burke, AD Davies, MB North Morris & K Creath (eds), Interferometry XIX. vol. 10749, 1074910, SPIE, Interferometry XIX 2018, San Diego, United States, 8/21/18. https://doi.org/10.1117/12.2322556
North Morris M, Frey E. Short coherence dynamic Fizeau interferometer with internal path matching for radius of curvature measurement. In Creath K, Burke J, Davies AD, North Morris MB, Creath K, editors, Interferometry XIX. Vol. 10749. SPIE. 2018. 1074910 https://doi.org/10.1117/12.2322556
North Morris, Michael ; Frey, Eric. / Short coherence dynamic Fizeau interferometer with internal path matching for radius of curvature measurement. Interferometry XIX. editor / Katherine Creath ; Jan Burke ; Angela D. Davies ; Michael B. North Morris ; Katherine Creath. Vol. 10749 SPIE, 2018.
@inproceedings{4b284fa7f3254339999d0d00003151f2,
title = "Short coherence dynamic Fizeau interferometer with internal path matching for radius of curvature measurement",
abstract = "One of the most time-consuming aspects of measuring the radius of curvature of a test article is repeatedly moving between the cateye and confocal positions for stage readings and measurements. Here we introduce a unique short coherence dynamic Fizeau interferometer with internal path matching that facilitates long term stability of the cateye reference position relative to the confocal position, eliminating the need to take repeated cateye measurements. The path matching assembly is equipped with a high-quality encoder and has an athermalized design for long-term stability of the path match locations. In addition, the interferometer uses a polarization based pixelated camera for single frame acquisition of the measurements. Combined with the short coherence source, the single frame measurements facilitate rapid scans of the fringe modulation as a function of stage position for accurately locating the relative position of the test article along the optical axis. Radius of curvature measurement repeatability of less than a micron has been demonstrated. This paper will discuss the theory of operation and present the results of measurement studies.",
keywords = "Dynamic Interferometer, Fizeau, Interferometry, Micro-Polarizer, Radius of Curvature, Short Coherence",
author = "{North Morris}, Michael and Eric Frey",
year = "2018",
month = "1",
day = "1",
doi = "10.1117/12.2322556",
language = "English (US)",
volume = "10749",
editor = "Katherine Creath and Jan Burke and Davies, {Angela D.} and {North Morris}, {Michael B.} and Katherine Creath",
booktitle = "Interferometry XIX",
publisher = "SPIE",

}

TY - GEN

T1 - Short coherence dynamic Fizeau interferometer with internal path matching for radius of curvature measurement

AU - North Morris, Michael

AU - Frey, Eric

PY - 2018/1/1

Y1 - 2018/1/1

N2 - One of the most time-consuming aspects of measuring the radius of curvature of a test article is repeatedly moving between the cateye and confocal positions for stage readings and measurements. Here we introduce a unique short coherence dynamic Fizeau interferometer with internal path matching that facilitates long term stability of the cateye reference position relative to the confocal position, eliminating the need to take repeated cateye measurements. The path matching assembly is equipped with a high-quality encoder and has an athermalized design for long-term stability of the path match locations. In addition, the interferometer uses a polarization based pixelated camera for single frame acquisition of the measurements. Combined with the short coherence source, the single frame measurements facilitate rapid scans of the fringe modulation as a function of stage position for accurately locating the relative position of the test article along the optical axis. Radius of curvature measurement repeatability of less than a micron has been demonstrated. This paper will discuss the theory of operation and present the results of measurement studies.

AB - One of the most time-consuming aspects of measuring the radius of curvature of a test article is repeatedly moving between the cateye and confocal positions for stage readings and measurements. Here we introduce a unique short coherence dynamic Fizeau interferometer with internal path matching that facilitates long term stability of the cateye reference position relative to the confocal position, eliminating the need to take repeated cateye measurements. The path matching assembly is equipped with a high-quality encoder and has an athermalized design for long-term stability of the path match locations. In addition, the interferometer uses a polarization based pixelated camera for single frame acquisition of the measurements. Combined with the short coherence source, the single frame measurements facilitate rapid scans of the fringe modulation as a function of stage position for accurately locating the relative position of the test article along the optical axis. Radius of curvature measurement repeatability of less than a micron has been demonstrated. This paper will discuss the theory of operation and present the results of measurement studies.

KW - Dynamic Interferometer

KW - Fizeau

KW - Interferometry

KW - Micro-Polarizer

KW - Radius of Curvature

KW - Short Coherence

UR - http://www.scopus.com/inward/record.url?scp=85055638592&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85055638592&partnerID=8YFLogxK

U2 - 10.1117/12.2322556

DO - 10.1117/12.2322556

M3 - Conference contribution

AN - SCOPUS:85055638592

VL - 10749

BT - Interferometry XIX

A2 - Creath, Katherine

A2 - Burke, Jan

A2 - Davies, Angela D.

A2 - North Morris, Michael B.

A2 - Creath, Katherine

PB - SPIE

ER -