Abstract
There is no abstract available for the item entitled Reclaiming copper/low-k control wafers during development of 0.13- and 0.10-μm devices.
Original language | English (US) |
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Pages (from-to) | 23-28 |
Number of pages | 6 |
Journal | MICRO |
Volume | 20 |
Issue number | 8 |
State | Published - 2002 |
Externally published | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- General Materials Science
- Condensed Matter Physics
- Electrical and Electronic Engineering