Reclaiming copper/low-k control wafers during development of 0.13- and 0.10-μm devices

Edit Braunstein, Daniele Gilkes, Steven Lippy, Stephen Reid, Ricky Adebanjo

Research output: Contribution to journalArticlepeer-review

Abstract

There is no abstract available for the item entitled Reclaiming copper/low-k control wafers during development of 0.13- and 0.10-μm devices.

Original languageEnglish (US)
Pages (from-to)23-28
Number of pages6
JournalMICRO
Volume20
Issue number8
StatePublished - Dec 1 2002
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Science(all)
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'Reclaiming copper/low-k control wafers during development of 0.13- and 0.10-μm devices'. Together they form a unique fingerprint.

Cite this