TY - GEN
T1 - Postbuckling investigation on the micromachined double-clamped beams
AU - Chen, Xing
AU - Ma, Liansheng
AU - Zheng, Yingmei
AU - Wang, Bo
AU - Lee, Dong Weon
N1 - Copyright:
Copyright 2011 Elsevier B.V., All rights reserved.
PY - 2012
Y1 - 2012
N2 - In this paper, thermal postbuckling of a beam-like structure subjected to a uniform thermal loading is studied both theoretically and experimentally. In theory aspect, the equations governing the axial and transverse deformations of beams are derived. The two equations are reduced to a single nonlinear fourth-order integral-differential equation governing the transverse deformations. The analytical method presented here offers a simple yet efficient solution approach to analyze the bistable behavior of microbeam or beam-like structures under thermal loading. Then, microfabricated double-clamped beams are chosen as experimental object due to its precise dimensions and easy loading method. The lab-made HF vapor system was used to release the suspended structures with satisfactory results. After the fabrication and measurement, by comparing the theoretical results with experimental results, an excellent agreement is gotten. It proves not only the validity of the solution obtained here, on the other hand, importantly, it also demonstrates a new field for MEMS as another easy and accurate tool to investigate mechanics problems. With the accurate solutions for posbuckling beams, we apply it into new electrothermal postbuckling actuators, a big deflection promising the possibility of a new kind of actuator.
AB - In this paper, thermal postbuckling of a beam-like structure subjected to a uniform thermal loading is studied both theoretically and experimentally. In theory aspect, the equations governing the axial and transverse deformations of beams are derived. The two equations are reduced to a single nonlinear fourth-order integral-differential equation governing the transverse deformations. The analytical method presented here offers a simple yet efficient solution approach to analyze the bistable behavior of microbeam or beam-like structures under thermal loading. Then, microfabricated double-clamped beams are chosen as experimental object due to its precise dimensions and easy loading method. The lab-made HF vapor system was used to release the suspended structures with satisfactory results. After the fabrication and measurement, by comparing the theoretical results with experimental results, an excellent agreement is gotten. It proves not only the validity of the solution obtained here, on the other hand, importantly, it also demonstrates a new field for MEMS as another easy and accurate tool to investigate mechanics problems. With the accurate solutions for posbuckling beams, we apply it into new electrothermal postbuckling actuators, a big deflection promising the possibility of a new kind of actuator.
KW - Microbeams
KW - Postbuckling beams
KW - Thermal actuators
UR - http://www.scopus.com/inward/record.url?scp=83255189007&partnerID=8YFLogxK
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U2 - 10.4028/www.scientific.net/AMR.403-408.3357
DO - 10.4028/www.scientific.net/AMR.403-408.3357
M3 - Conference contribution
AN - SCOPUS:83255189007
SN - 9783037853122
T3 - Advanced Materials Research
SP - 3357
EP - 3363
BT - MEMS, NANO and Smart Systems
T2 - 2011 7th International Conference on MEMS, NANO and Smart Systems, ICMENS 2011
Y2 - 4 November 2011 through 6 November 2011
ER -