Abstract
A polysilicon surface micromachining procedure for making neural microprobes for recording single and multiunit activity is presented. This procedure seems to offer a simpler alternative to bulk micromachining for batch fabricating microprobes for chronic neurophysiological recordings.
Original language | English (US) |
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Pages (from-to) | S-112 |
Journal | Annals of biomedical engineering |
Volume | 28 |
Issue number | SUPPL. 1 |
State | Published - 2000 |
Event | 2000 Annual Fall Meeting of the Biomedical Engineering Society - Washington, WA, USA Duration: Oct 12 2000 → Oct 14 2000 |
ASJC Scopus subject areas
- Biomedical Engineering