Palladium based micro-membrane hydrogen gas separator-reactor in a miniature fuel processor for micro fuel cells

Sooraj V. Karnik, Miltiadis K. Hatalis, Mayuresh V. Kothare

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A novel palladium-based micromembrane has been fabricated and tested which has the potential to be used for carbon monoxide shift reaction and hydrogen gas separation in a miniature fuel processor for micro fuel cells. The micromembrane structure is built in silicon substrate, using standard MEMS microfabrication processes. The four layers, viz., copper, aluminum, spin-on-glass (SOG) and palladium form the composite micromembrane. Copper, aluminum and SOG serve as a structural support for the palladium film. Copper also acts as a catalyst in the shift reaction that converts unwanted carbon monoxide gas into hydrogen, which in turn is separated by the palladium micro-membrane. For a particular combination of thicknesses for various layers, the composite micro-membrane withstands a pressure gradient up to 1 atm. The micromembrane separates hydrogen from a 20% hydrogen balance nitrogen gas mixture at room temperature.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
Pages243-248
Number of pages6
Volume687
StatePublished - 2002
Externally publishedYes
EventMaterials Science of Microelectromechanical Systems (MEMS) Devices IV - Boston, MA, United States
Duration: Nov 25 2001Nov 28 2001

Other

OtherMaterials Science of Microelectromechanical Systems (MEMS) Devices IV
CountryUnited States
CityBoston, MA
Period11/25/0111/28/01

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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