Abstract
A novel palladium-based micromembrane has been fabricated and tested which has the potential to be used for carbon monoxide shift reaction and hydrogen gas separation in a miniature fuel processor for micro fuel cells. The micromembrane structure is built in silicon substrate, using standard MEMS microfabrication processes. The four layers, viz., copper, aluminum, spin-on-glass (SOG) and palladium form the composite micromembrane. Copper, aluminum and SOG serve as a structural support for the palladium film. Copper also acts as a catalyst in the shift reaction that converts unwanted carbon monoxide gas into hydrogen, which in turn is separated by the palladium micro-membrane. For a particular combination of thicknesses for various layers, the composite micro-membrane withstands a pressure gradient up to 1 atm. The micromembrane separates hydrogen from a 20% hydrogen balance nitrogen gas mixture at room temperature.
Original language | English (US) |
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Title of host publication | Materials Research Society Symposium - Proceedings |
Pages | 243-248 |
Number of pages | 6 |
Volume | 687 |
State | Published - 2002 |
Externally published | Yes |
Event | Materials Science of Microelectromechanical Systems (MEMS) Devices IV - Boston, MA, United States Duration: Nov 25 2001 → Nov 28 2001 |
Other
Other | Materials Science of Microelectromechanical Systems (MEMS) Devices IV |
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Country/Territory | United States |
City | Boston, MA |
Period | 11/25/01 → 11/28/01 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials