Novel fabrication process for transverse and longitudinal mode PZT actuators

Isaac Misri, Prakruthi Hareesh, Shuang Yang, Don L. Devoe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Bulk PZT sheets are patterned using micro powder blasting and a dry film photoresist to fabricate functional piezoelectric actuators. Etch characterization of bulk PZT is reported for improved powder blasting parameters. Using this information, PZT actuators are successfully fabricated and tested. The developed method described offers great potential for future bulk PZT transducers, as it provides relatively high resolutions, a reduced etch time, and simple implementation.

Original languageEnglish (US)
Title of host publicationMAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation
DOIs
StatePublished - Jun 1 2012
Event2012 Spring Symposium on Microsystems for Measurement and Instrumentation, MAMNA 2012 - Annapolis, MD, United States
Duration: Mar 27 2012Mar 27 2012

Publication series

NameMAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation

Other

Other2012 Spring Symposium on Microsystems for Measurement and Instrumentation, MAMNA 2012
CountryUnited States
CityAnnapolis, MD
Period3/27/123/27/12

Keywords

  • Fabrication
  • Piezoelectric Actuators

ASJC Scopus subject areas

  • Control and Systems Engineering

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  • Cite this

    Misri, I., Hareesh, P., Yang, S., & Devoe, D. L. (2012). Novel fabrication process for transverse and longitudinal mode PZT actuators. In MAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation [6195097] (MAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation). https://doi.org/10.1109/MAMNA.2012.6195097