TY - GEN
T1 - Novel fabrication process for transverse and longitudinal mode PZT actuators
AU - Misri, Isaac
AU - Hareesh, Prakruthi
AU - Yang, Shuang
AU - Devoe, Don L.
PY - 2012
Y1 - 2012
N2 - Bulk PZT sheets are patterned using micro powder blasting and a dry film photoresist to fabricate functional piezoelectric actuators. Etch characterization of bulk PZT is reported for improved powder blasting parameters. Using this information, PZT actuators are successfully fabricated and tested. The developed method described offers great potential for future bulk PZT transducers, as it provides relatively high resolutions, a reduced etch time, and simple implementation.
AB - Bulk PZT sheets are patterned using micro powder blasting and a dry film photoresist to fabricate functional piezoelectric actuators. Etch characterization of bulk PZT is reported for improved powder blasting parameters. Using this information, PZT actuators are successfully fabricated and tested. The developed method described offers great potential for future bulk PZT transducers, as it provides relatively high resolutions, a reduced etch time, and simple implementation.
KW - Fabrication
KW - Piezoelectric Actuators
UR - http://www.scopus.com/inward/record.url?scp=84861553951&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84861553951&partnerID=8YFLogxK
U2 - 10.1109/MAMNA.2012.6195097
DO - 10.1109/MAMNA.2012.6195097
M3 - Conference contribution
AN - SCOPUS:84861553951
SN - 9781467317818
T3 - MAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation
BT - MAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation
T2 - 2012 Spring Symposium on Microsystems for Measurement and Instrumentation, MAMNA 2012
Y2 - 27 March 2012 through 27 March 2012
ER -