Novel fabrication process for transverse and longitudinal mode PZT actuators

Isaac Misri, Prakruthi Hareesh, Shuang Yang, Don L. Devoe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Bulk PZT sheets are patterned using micro powder blasting and a dry film photoresist to fabricate functional piezoelectric actuators. Etch characterization of bulk PZT is reported for improved powder blasting parameters. Using this information, PZT actuators are successfully fabricated and tested. The developed method described offers great potential for future bulk PZT transducers, as it provides relatively high resolutions, a reduced etch time, and simple implementation.

Original languageEnglish (US)
Title of host publicationMAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation
DOIs
StatePublished - 2012
Externally publishedYes
Event2012 Spring Symposium on Microsystems for Measurement and Instrumentation, MAMNA 2012 - Annapolis, MD, United States
Duration: Mar 27 2012Mar 27 2012

Other

Other2012 Spring Symposium on Microsystems for Measurement and Instrumentation, MAMNA 2012
CountryUnited States
CityAnnapolis, MD
Period3/27/123/27/12

Fingerprint

Blasting
Actuators
Powders
Fabrication
Piezoelectric actuators
Photoresists
Transducers

Keywords

  • Fabrication
  • Piezoelectric Actuators

ASJC Scopus subject areas

  • Control and Systems Engineering

Cite this

Misri, I., Hareesh, P., Yang, S., & Devoe, D. L. (2012). Novel fabrication process for transverse and longitudinal mode PZT actuators. In MAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation [6195097] https://doi.org/10.1109/MAMNA.2012.6195097

Novel fabrication process for transverse and longitudinal mode PZT actuators. / Misri, Isaac; Hareesh, Prakruthi; Yang, Shuang; Devoe, Don L.

MAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation. 2012. 6195097.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Misri, I, Hareesh, P, Yang, S & Devoe, DL 2012, Novel fabrication process for transverse and longitudinal mode PZT actuators. in MAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation., 6195097, 2012 Spring Symposium on Microsystems for Measurement and Instrumentation, MAMNA 2012, Annapolis, MD, United States, 3/27/12. https://doi.org/10.1109/MAMNA.2012.6195097
Misri I, Hareesh P, Yang S, Devoe DL. Novel fabrication process for transverse and longitudinal mode PZT actuators. In MAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation. 2012. 6195097 https://doi.org/10.1109/MAMNA.2012.6195097
Misri, Isaac ; Hareesh, Prakruthi ; Yang, Shuang ; Devoe, Don L. / Novel fabrication process for transverse and longitudinal mode PZT actuators. MAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation. 2012.
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