Millimeter-scale scanning MEMS mirror with sub-wavelength micro-hole arrays for terahertz wave scanning

Hyeon Cheol Park; Jung Hwan Lee; Sang Gil Park; Ki Hun Jeong

doi:10.1109/OMEMS.2012.6318889

Millimeter-scale scanning MEMS mirror with sub-wavelength micro-hole arrays for terahertz wave scanning

Hyeon Cheol Park, Jung Hwan Lee, Sang Gil Park, Ki Hun Jeong

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Millimeter scale scanning MEMS mirror with sub-wavelength microhole arrays has been successfully demonstrated for terahertz wave scanning. Sub-wavelength microhole arrays provide both high reflectivity at THz waves and low air damping during the mirror scanning.

Original language	English (US)
Title of host publication	2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
Pages	234-235
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2012.6318889
State	Published - 2012
Externally published	Yes
Event	2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 - Banff, AB, Canada Duration: Aug 6 2012 → Aug 9 2012

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Conference

Conference	2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
Country/Territory	Canada
City	Banff, AB
Period	8/6/12 → 8/9/12

Keywords

MEMS scanning mirror
Terahertz
Terahertz time-domain spectroscopy. Sub-wavelength structure

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/OMEMS.2012.6318889

Cite this

Park, H. C., Lee, J. H., Park, S. G., & Jeong, K. H. (2012). Millimeter-scale scanning MEMS mirror with sub-wavelength micro-hole arrays for terahertz wave scanning. In 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 (pp. 234-235). Article 6318889 (International Conference on Optical MEMS and Nanophotonics). https://doi.org/10.1109/OMEMS.2012.6318889

Millimeter-scale scanning MEMS mirror with sub-wavelength micro-hole arrays for terahertz wave scanning. / Park, Hyeon Cheol; Lee, Jung Hwan; Park, Sang Gil et al.
2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012. 2012. p. 234-235 6318889 (International Conference on Optical MEMS and Nanophotonics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Park, HC, Lee, JH, Park, SG & Jeong, KH 2012, Millimeter-scale scanning MEMS mirror with sub-wavelength micro-hole arrays for terahertz wave scanning. in 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012., 6318889, International Conference on Optical MEMS and Nanophotonics, pp. 234-235, 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012, Banff, AB, Canada, 8/6/12. https://doi.org/10.1109/OMEMS.2012.6318889

@inproceedings{9d103fbad55840359a1fce1852c4c3ac,

title = "Millimeter-scale scanning MEMS mirror with sub-wavelength micro-hole arrays for terahertz wave scanning",

abstract = "Millimeter scale scanning MEMS mirror with sub-wavelength microhole arrays has been successfully demonstrated for terahertz wave scanning. Sub-wavelength microhole arrays provide both high reflectivity at THz waves and low air damping during the mirror scanning.",

keywords = "MEMS scanning mirror, Terahertz, Terahertz time-domain spectroscopy. Sub-wavelength structure",

author = "Park, {Hyeon Cheol} and Lee, {Jung Hwan} and Park, {Sang Gil} and Jeong, {Ki Hun}",

year = "2012",

doi = "10.1109/OMEMS.2012.6318889",

language = "English (US)",

isbn = "9781457715112",

series = "International Conference on Optical MEMS and Nanophotonics",

pages = "234--235",

booktitle = "2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012",

}

TY - GEN

T1 - Millimeter-scale scanning MEMS mirror with sub-wavelength micro-hole arrays for terahertz wave scanning

AU - Park, Hyeon Cheol

AU - Lee, Jung Hwan

AU - Park, Sang Gil

AU - Jeong, Ki Hun

PY - 2012

Y1 - 2012

N2 - Millimeter scale scanning MEMS mirror with sub-wavelength microhole arrays has been successfully demonstrated for terahertz wave scanning. Sub-wavelength microhole arrays provide both high reflectivity at THz waves and low air damping during the mirror scanning.

AB - Millimeter scale scanning MEMS mirror with sub-wavelength microhole arrays has been successfully demonstrated for terahertz wave scanning. Sub-wavelength microhole arrays provide both high reflectivity at THz waves and low air damping during the mirror scanning.

KW - MEMS scanning mirror

KW - Terahertz

KW - Terahertz time-domain spectroscopy. Sub-wavelength structure

UR - http://www.scopus.com/inward/record.url?scp=84869167222&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84869167222&partnerID=8YFLogxK

U2 - 10.1109/OMEMS.2012.6318889

DO - 10.1109/OMEMS.2012.6318889

M3 - Conference contribution

AN - SCOPUS:84869167222

SN - 9781457715112

T3 - International Conference on Optical MEMS and Nanophotonics

SP - 234

EP - 235

BT - 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012

T2 - 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012

Y2 - 6 August 2012 through 9 August 2012

ER -

Millimeter-scale scanning MEMS mirror with sub-wavelength micro-hole arrays for terahertz wave scanning

Abstract

Publication series

Conference

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this