Millimeter-scale scanning MEMS mirror with sub-wavelength micro-hole arrays for terahertz wave scanning

Hyeon Cheol Park, Jung Hwan Lee, Sang Gil Park, Ki Hun Jeong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Millimeter scale scanning MEMS mirror with sub-wavelength microhole arrays has been successfully demonstrated for terahertz wave scanning. Sub-wavelength microhole arrays provide both high reflectivity at THz waves and low air damping during the mirror scanning.

Original languageEnglish (US)
Title of host publication2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
Pages234-235
Number of pages2
DOIs
StatePublished - 2012
Externally publishedYes
Event2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 - Banff, AB, Canada
Duration: Aug 6 2012Aug 9 2012

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

Conference2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
CountryCanada
CityBanff, AB
Period8/6/128/9/12

Keywords

  • MEMS scanning mirror
  • Terahertz
  • Terahertz time-domain spectroscopy. Sub-wavelength structure

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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