TY - GEN
T1 - Micromachined two dimensional lens scanner with large aperture beam
AU - Park, Hyeon Cheol
AU - Song, Cheol
AU - Jeong, Ki Hun
N1 - Copyright:
Copyright 2011 Elsevier B.V., All rights reserved.
PY - 2010
Y1 - 2010
N2 - This work present a novel approach for miniaturized optical scanning using the two-axis MEMS lens scanning system with large beam diameter of 0.6mm. A millimeter aspheric glass lenses are integrated on electrostatic MEMS actuators to fold optical path. By integrating optical components perpendicularly on MEMS actuators, more compact device size along the optical axis is accomplished within 2mm. The scanning angle of 4.6° and 5.3° at the scanning speed of 276.5Hz and 294.4Hz for x-scanning and yscanning respectively are achieved, when actuated by only DC 5V and AC peak to peak 10V biased resonance excitation.
AB - This work present a novel approach for miniaturized optical scanning using the two-axis MEMS lens scanning system with large beam diameter of 0.6mm. A millimeter aspheric glass lenses are integrated on electrostatic MEMS actuators to fold optical path. By integrating optical components perpendicularly on MEMS actuators, more compact device size along the optical axis is accomplished within 2mm. The scanning angle of 4.6° and 5.3° at the scanning speed of 276.5Hz and 294.4Hz for x-scanning and yscanning respectively are achieved, when actuated by only DC 5V and AC peak to peak 10V biased resonance excitation.
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U2 - 10.1109/OMEMS.2010.5672168
DO - 10.1109/OMEMS.2010.5672168
M3 - Conference contribution
AN - SCOPUS:78751554620
SN - 9781424489251
T3 - 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
SP - 91
EP - 92
BT - 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
T2 - 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
Y2 - 9 August 2010 through 12 August 2010
ER -