Micromachined two dimensional lens scanner with large aperture beam

Hyeon Cheol Park, Cheol Song, Ki Hun Jeong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work present a novel approach for miniaturized optical scanning using the two-axis MEMS lens scanning system with large beam diameter of 0.6mm. A millimeter aspheric glass lenses are integrated on electrostatic MEMS actuators to fold optical path. By integrating optical components perpendicularly on MEMS actuators, more compact device size along the optical axis is accomplished within 2mm. The scanning angle of 4.6° and 5.3° at the scanning speed of 276.5Hz and 294.4Hz for x-scanning and yscanning respectively are achieved, when actuated by only DC 5V and AC peak to peak 10V biased resonance excitation.

Original languageEnglish (US)
Title of host publication2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
Pages91-92
Number of pages2
DOIs
StatePublished - 2010
Externally publishedYes
Event2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 - Sapporo, Japan
Duration: Aug 9 2010Aug 12 2010

Publication series

Name2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010

Conference

Conference2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
CountryJapan
CitySapporo
Period8/9/108/12/10

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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