Micromachined lens microstages for two-dimensional forward optical scanning

Hyeon Cheol Park; Cheol Song; Ki Hun Jeong

doi:10.1364/OE.18.016133

Micromachined lens microstages for two-dimensional forward optical scanning

Hyeon Cheol Park, Cheol Song, Ki Hun Jeong

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

Abstract

This work presents a novel approach for a miniaturized optical scanning module based on lateral and piston motion of two commercial lenses by MEMS actuation. Two aspheric glass lenses of 1 mm diameter are assembled on two electrostatically actuated microstages moving along perpendicular axes to tilt optical path. The compact integration secures the effective beam aperture of 0.6 mm within the device width of 2 mm. The lens mass provides high-Q motions at low operating voltages of DC 5 V and AC 10 V_pp, i.e., the lateral angle of ± 4.6° at 277 Hz and the vertical angle of ± 5.3° at 204 Hz. The device can provide a new direction for miniaturizing laser scanning based endoscopes or handheld projectors.

Original language	English (US)
Pages (from-to)	16133-16138
Number of pages	6
Journal	Optics Express
Volume	18
Issue number	15
DOIs	https://doi.org/10.1364/OE.18.016133
State	Published - Jul 19 2010
Externally published	Yes

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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AB - This work presents a novel approach for a miniaturized optical scanning module based on lateral and piston motion of two commercial lenses by MEMS actuation. Two aspheric glass lenses of 1 mm diameter are assembled on two electrostatically actuated microstages moving along perpendicular axes to tilt optical path. The compact integration secures the effective beam aperture of 0.6 mm within the device width of 2 mm. The lens mass provides high-Q motions at low operating voltages of DC 5 V and AC 10 Vpp, i.e., the lateral angle of ± 4.6° at 277 Hz and the vertical angle of ± 5.3° at 204 Hz. The device can provide a new direction for miniaturizing laser scanning based endoscopes or handheld projectors.

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Micromachined lens microstages for two-dimensional forward optical scanning

Abstract

ASJC Scopus subject areas

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