MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan

Lin Liu; Erkang Wang; Xiaoyang Zhang; Wenxuan Liang; Xingde Li; Huikai Xie

doi:10.1016/j.sna.2013.09.035

MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan

Lin Liu, Erkang Wang, Xiaoyang Zhang, Wenxuan Liang, Xingde Li, Huikai Xie

School of Medicine

Research output: Contribution to journal › Article › peer-review

40 Scopus citations

Abstract

A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ±26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.

Original language	English (US)
Pages (from-to)	89-95
Number of pages	7
Journal	Sensors and Actuators, A: Physical
Volume	215
DOIs	https://doi.org/10.1016/j.sna.2013.09.035
State	Published - Aug 15 2014

Keywords

3D confocal imaging
3D microendoscope
Bimorph
Electrothermal actuator
MEMS mirror
MEMS tunable lens

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/j.sna.2013.09.035

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@article{66cdfbb74a4446788437a5027e581a75,

title = "MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan",

abstract = "A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ±26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.",

keywords = "3D confocal imaging, 3D microendoscope, Bimorph, Electrothermal actuator, MEMS mirror, MEMS tunable lens",

author = "Lin Liu and Erkang Wang and Xiaoyang Zhang and Wenxuan Liang and Xingde Li and Huikai Xie",

note = "Funding Information: This work was funded in part by the National Science Foundation under award#1002209 and the National Institutes of Health R01 CA153023 . The MEMS devices were fabricated at the Nanoscale Research Facility at the University of Florida. ",

year = "2014",

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day = "15",

doi = "10.1016/j.sna.2013.09.035",

language = "English (US)",

volume = "215",

pages = "89--95",

journal = "Sensors and Actuators, A: Physical",

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AU - Liu, Lin

AU - Wang, Erkang

AU - Zhang, Xiaoyang

AU - Liang, Wenxuan

AU - Li, Xingde

AU - Xie, Huikai

N1 - Funding Information: This work was funded in part by the National Science Foundation under award#1002209 and the National Institutes of Health R01 CA153023 . The MEMS devices were fabricated at the Nanoscale Research Facility at the University of Florida.

PY - 2014/8/15

Y1 - 2014/8/15

N2 - A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ±26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.

AB - A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ±26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.

KW - 3D confocal imaging

KW - 3D microendoscope

KW - Bimorph

KW - Electrothermal actuator

KW - MEMS mirror

KW - MEMS tunable lens

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JF - Sensors and Actuators, A: Physical

ER -

MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan

Abstract

Keywords

ASJC Scopus subject areas

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