MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan

Lin Liu, Erkang Wang, Xiaoyang Zhang, Wenxuan Liang, Xingde Li, Huikai Xie

Research output: Contribution to journalArticlepeer-review

Abstract

A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ±26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.

Original languageEnglish (US)
Pages (from-to)89-95
Number of pages7
JournalSensors and Actuators, A: Physical
Volume215
DOIs
StatePublished - Aug 15 2014

Keywords

  • 3D confocal imaging
  • 3D microendoscope
  • Bimorph
  • Electrothermal actuator
  • MEMS mirror
  • MEMS tunable lens

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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