Integrated microactuation scanning probe microscopy system

This article reports on a highly integrated system that combines a scanning probe cantilever with an X-Y-Z scanner through monolithic microfabrication without any manual assembly or alignment for scanning probe microscopy. This compact system included an integrated scanning probe cantilever with a sharp tip and an electrostatic comb-drive microstage with a novel structure that enables both a large in-plane displacement and out-of-plane actuation even for tilt motion. Additionally, interdigitated comb-drive capacitors allow for sensitive self-sensing on both the translational position and vertical height without any external detectors or special extra integrated sensors. The cantilever, with a sharp tip fabricated by new hybrid wet and dry etching, was developed for the scanning probe system. The authors successfully demonstrated the miniaturized scanning probe microscopy system to show how microelectromechanical system techniques have an influence on the conventional bulk system and macroscopic instruments.