INTEGRATED FORCE ARRAY SENSOR.

R. H. Taylor, D. J. Webb

Research output: Contribution to journalArticlepeer-review

Abstract

A touch sensor with high spatial resolution and capability for force measurement is described. The touch sensor incorporates an acoustic detector having an array of transducers integrated with an underlying silicon layer. An ac voltage is applied between the silicon layer and an upper metallic layer. This device is useful as a touch and force pattern sensor for mechanical actuators, such as robot arms, etc.

Original languageEnglish (US)
Pages (from-to)6424-6425
Number of pages2
JournalIBM technical disclosure bulletin
Volume25
Issue number12
StatePublished - Jan 1 1983
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)

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