INTEGRATED FORCE ARRAY SENSOR.

Russell H Taylor, D. J. Webb

Research output: Contribution to journalArticle

Abstract

A touch sensor with high spatial resolution and capability for force measurement is described. The touch sensor incorporates an acoustic detector having an array of transducers integrated with an underlying silicon layer. An ac voltage is applied between the silicon layer and an upper metallic layer. This device is useful as a touch and force pattern sensor for mechanical actuators, such as robot arms, etc.

Original languageEnglish (US)
Pages (from-to)6424-6425
Number of pages2
JournalIBM technical disclosure bulletin
Volume25
Issue number12
StatePublished - May 1983
Externally publishedYes

Fingerprint

Sensor arrays
Sensors
Mechanical actuators
Silicon
Force measurement
Transducers
Acoustics
Robots
Detectors
Electric potential

ASJC Scopus subject areas

  • Engineering(all)

Cite this

INTEGRATED FORCE ARRAY SENSOR. / Taylor, Russell H; Webb, D. J.

In: IBM technical disclosure bulletin, Vol. 25, No. 12, 05.1983, p. 6424-6425.

Research output: Contribution to journalArticle

Taylor, RH & Webb, DJ 1983, 'INTEGRATED FORCE ARRAY SENSOR.', IBM technical disclosure bulletin, vol. 25, no. 12, pp. 6424-6425.
Taylor, Russell H ; Webb, D. J. / INTEGRATED FORCE ARRAY SENSOR. In: IBM technical disclosure bulletin. 1983 ; Vol. 25, No. 12. pp. 6424-6425.
@article{947c8164bf754f48bf6ced4b2bfa7086,
title = "INTEGRATED FORCE ARRAY SENSOR.",
abstract = "A touch sensor with high spatial resolution and capability for force measurement is described. The touch sensor incorporates an acoustic detector having an array of transducers integrated with an underlying silicon layer. An ac voltage is applied between the silicon layer and an upper metallic layer. This device is useful as a touch and force pattern sensor for mechanical actuators, such as robot arms, etc.",
author = "Taylor, {Russell H} and Webb, {D. J.}",
year = "1983",
month = "5",
language = "English (US)",
volume = "25",
pages = "6424--6425",
journal = "IBM technical disclosure bulletin",
issn = "0018-8689",
number = "12",

}

TY - JOUR

T1 - INTEGRATED FORCE ARRAY SENSOR.

AU - Taylor, Russell H

AU - Webb, D. J.

PY - 1983/5

Y1 - 1983/5

N2 - A touch sensor with high spatial resolution and capability for force measurement is described. The touch sensor incorporates an acoustic detector having an array of transducers integrated with an underlying silicon layer. An ac voltage is applied between the silicon layer and an upper metallic layer. This device is useful as a touch and force pattern sensor for mechanical actuators, such as robot arms, etc.

AB - A touch sensor with high spatial resolution and capability for force measurement is described. The touch sensor incorporates an acoustic detector having an array of transducers integrated with an underlying silicon layer. An ac voltage is applied between the silicon layer and an upper metallic layer. This device is useful as a touch and force pattern sensor for mechanical actuators, such as robot arms, etc.

UR - http://www.scopus.com/inward/record.url?scp=0020754030&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0020754030&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0020754030

VL - 25

SP - 6424

EP - 6425

JO - IBM technical disclosure bulletin

JF - IBM technical disclosure bulletin

SN - 0018-8689

IS - 12

ER -