TY - GEN
T1 - Instantaneous phase-shift Fizeau interferometer utilizing a synchronous frequency shift mechanism
AU - Kimbrough, Brad
AU - Frey, Eric
AU - Millerd, James
PY - 2008
Y1 - 2008
N2 - An on-axis, vibration insensitive, polarization Fizeau interferometer is realized through the use of a pixelated polarization mask spatial carrier phase shifting technique in conjunction with a high coherence source and a polarization frequency shift device. In this arrangement, differential motion between the test and reference surfaces, in conjunction with the polarization frequency shift device, is used to effectively separate the orthogonally polarized test and reference beam components for interference. With both the test and the reference beams on-axis, the common path cancellation advantages of the Fizeau interferometer are maintained. Additionally, the use of a high coherence source eliminates the need to path match the test and reference arms of the interferometer. Using a 1 mW HeNe source, the optimum camera shutter speed, used when measuring a 4% reflector, was 250 usee, resulting in significantly reduced vibration sensitivity. Experimental results show the performance of this new interferometer to be within the specifications of commercial phase shifting interferometers.
AB - An on-axis, vibration insensitive, polarization Fizeau interferometer is realized through the use of a pixelated polarization mask spatial carrier phase shifting technique in conjunction with a high coherence source and a polarization frequency shift device. In this arrangement, differential motion between the test and reference surfaces, in conjunction with the polarization frequency shift device, is used to effectively separate the orthogonally polarized test and reference beam components for interference. With both the test and the reference beams on-axis, the common path cancellation advantages of the Fizeau interferometer are maintained. Additionally, the use of a high coherence source eliminates the need to path match the test and reference arms of the interferometer. Using a 1 mW HeNe source, the optimum camera shutter speed, used when measuring a 4% reflector, was 250 usee, resulting in significantly reduced vibration sensitivity. Experimental results show the performance of this new interferometer to be within the specifications of commercial phase shifting interferometers.
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U2 - 10.1117/12.794864
DO - 10.1117/12.794864
M3 - Conference contribution
AN - SCOPUS:52249113940
SN - 9780819472830
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Interferometry XIV
T2 - Interferometry XIV: Techniques and Analysis
Y2 - 11 August 2008 through 13 August 2008
ER -