Instantaneous phase-shift Fizeau interferometer utilizing a synchronous frequency shift mechanism

Brad Kimbrough, Eric Frey, James Millerd

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An on-axis, vibration insensitive, polarization Fizeau interferometer is realized through the use of a pixelated polarization mask spatial carrier phase shifting technique in conjunction with a high coherence source and a polarization frequency shift device. In this arrangement, differential motion between the test and reference surfaces, in conjunction with the polarization frequency shift device, is used to effectively separate the orthogonally polarized test and reference beam components for interference. With both the test and the reference beams on-axis, the common path cancellation advantages of the Fizeau interferometer are maintained. Additionally, the use of a high coherence source eliminates the need to path match the test and reference arms of the interferometer. Using a 1 mW HeNe source, the optimum camera shutter speed, used when measuring a 4% reflector, was 250 usee, resulting in significantly reduced vibration sensitivity. Experimental results show the performance of this new interferometer to be within the specifications of commercial phase shifting interferometers.

Original languageEnglish (US)
Title of host publicationInterferometry XIV
Subtitle of host publicationTechniques and Analysis
DOIs
StatePublished - Sep 26 2008
Externally publishedYes
EventInterferometry XIV: Techniques and Analysis - San Diego, CA, United States
Duration: Aug 11 2008Aug 13 2008

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7063
ISSN (Print)0277-786X

Other

OtherInterferometry XIV: Techniques and Analysis
Country/TerritoryUnited States
CitySan Diego, CA
Period8/11/088/13/08

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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