Implementation of a Piezoresistive MEMS Cantilever for Nanoscale Force Measurement in Micro/Nano Robotic Applications

Deok Ho Kim, Byungkyu Kim, Jong Oh Park

Research output: Contribution to journalArticlepeer-review

Abstract

The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/ nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in microrobotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a microrobotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

Original languageEnglish (US)
Pages (from-to)789-797
Number of pages9
JournalKSME International Journal
Volume18
Issue number5
DOIs
StatePublished - May 2004
Externally publishedYes

Keywords

  • Atomic Force Microscope (AFM)
  • Micro Force Sensing
  • Micro/Nano-manipulation
  • Microrobotics
  • Piezoresistive MEMS Cantilever
  • Van der Waals Force

ASJC Scopus subject areas

  • Mechanical Engineering

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