High efficiency arrangement in comb-drive actuators

Xing Chen, Dong Weon Lee, Jun Ding

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a new comb-drive actuator arrangement that has a large displacement with low driving voltage and relatively small footprint. The new arrangements in the comb drivers can provide both pulling forces and pushing forces as compared to conventional drivers that only provide pulling forces, therefore additional displacements are achieved without increasing the driving voltage. This arrangement is verified numerically using FEM and the simulation results are consistent with the values derived from the mathematical model. The results show an obviously enhanced displacement and a compact layout.

Original languageEnglish (US)
Title of host publication3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies
Subtitle of host publicationDesign, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
DOIs
StatePublished - Dec 1 2007
Event3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems - Chengdu, China
Duration: Jul 8 2007Jul 12 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6724
ISSN (Print)0277-786X

Other

Other3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
CountryChina
CityChengdu
Period7/8/077/12/07

Keywords

  • Comb-drive actuator
  • High efficiency arrangement
  • MEMS
  • Micro XY-stage
  • Microactuators

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Chen, X., Lee, D. W., & Ding, J. (2007). High efficiency arrangement in comb-drive actuators. In 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems [67240Q] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6724). https://doi.org/10.1117/12.782684