@inproceedings{1a72ae10022a43c287f1021efdb2c006,
title = "Electrothermal MEMS fiber scanner with lissajous patterns for endomicroscopic applications",
abstract = "We report an electrothermal MEMS fiber scanner with Lissajous patterns for endomicroscopic applications. The MEMS fiber scanner consists of a double hot arm structure, and a directly mounted optical fiber. The mounted single mode optical fiber moves to angled direction due to both lateral and vertical force of MEMS fiber scanner due to Joule heating. Besides, top silicon structure makes resonance separation of the single mode fiber in lateral, and vertical directions. Resonance frequency separation allows two-dimensional Lissajous scanning without any additional structures, and Lissajous patterns were successfully obtained within 16 Vpp. This scanner can give a new direction for compact and cost-effective endomicroscopic catheter.",
keywords = "Electrothermal MEMS actuator, Endomicroscopy, Endoscopic catheter, Lissajous laser scanning, MEMS fiber scanner, Resonance frequency separation",
author = "Seo, {Yeong Hyeon} and Park, {Hyeon Cheol} and Jeong, {Ki Hun}",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE. Copyright: Copyright 2016 Elsevier B.V., All rights reserved.; 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 ; Conference date: 24-01-2016 Through 28-01-2016",
year = "2016",
month = feb,
day = "26",
doi = "10.1109/MEMSYS.2016.7421637",
language = "English (US)",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "367--370",
booktitle = "MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems",
}