Electrothermal MEMS fiber scanner with lissajous patterns for endomicroscopic applications

Yeong Hyeon Seo, Hyeon Cheol Park, Ki Hun Jeong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report an electrothermal MEMS fiber scanner with Lissajous patterns for endomicroscopic applications. The MEMS fiber scanner consists of a double hot arm structure, and a directly mounted optical fiber. The mounted single mode optical fiber moves to angled direction due to both lateral and vertical force of MEMS fiber scanner due to Joule heating. Besides, top silicon structure makes resonance separation of the single mode fiber in lateral, and vertical directions. Resonance frequency separation allows two-dimensional Lissajous scanning without any additional structures, and Lissajous patterns were successfully obtained within 16 Vpp. This scanner can give a new direction for compact and cost-effective endomicroscopic catheter.

Original languageEnglish (US)
Title of host publicationMEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages367-370
Number of pages4
ISBN (Electronic)9781509019731
DOIs
StatePublished - Feb 26 2016
Externally publishedYes
Event29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
Duration: Jan 24 2016Jan 28 2016

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2016-February
ISSN (Print)1084-6999

Other

Other29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
CountryChina
CityShanghai
Period1/24/161/28/16

Keywords

  • Electrothermal MEMS actuator
  • Endomicroscopy
  • Endoscopic catheter
  • Lissajous laser scanning
  • MEMS fiber scanner
  • Resonance frequency separation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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