Electrochemical monitoring of TiO₂ atomic layer deposition by chronoamperometry and scanning electrochemical microscopy

Engineering & Materials Science

• Chronoamperometry 100%
• Atomic layer deposition 87%
• Microscopic examination 61%
• Scanning 44%
• Tin oxides 39%
• Indium 37%
• Monitoring 32%
• Electrons 28%
• Microscopes 27%
• Electrochemistry 19%
• Microelectrodes 19%
• Atomic force microscopy 18%
• Deposits 14%
• Thin films 13%
• Porosity 12%
• Numerical models 11%
• Substrates 10%
• Finite element method 8%

Chemical Compounds

• Scanning Electrochemical Microscopy 73%
• Atomic Layer Epitaxy 65%
• Chronoamperometry 61%
• Tin Oxide 30%
• Conductive Atomic Force Microscopy 22%
• Electron Transfer 19%
• Porosity 16%
• Electrochemistry 13%
• Pore 9%