Dynamic focus-tracking MEMS scanning micromirror with low actuation voltages for endoscopic imaging

Matthew Strathman, Yunbo Liu, Xingde Li, Lih Y. Lin

Research output: Contribution to journalArticle

Abstract

We demonstrate a 3-D scanning micromirror device that combines 2-D beam scanning with focus control in the same device using micro-electro-mechanical- systems (MEMS) technology. 2-D beam scanning is achieved with a biaxial gimbal structure and focus control is obtained with a deformable mirror membrane surface. The micromirror with 800 micrometer diameter is designed to be sufficiently compact and efficient so that it can be incorporated into an endoscopic imaging probe in the future. The design, fabrication and characterization of the device are described in this paper. Using the focus-tracking MEMS scanning mirror, we achieved an optical scanning range of >16 degrees with <40 V actuation voltage at resonance and a tunable focal length between infinity and 25 mm with <100V applied bias.

Original languageEnglish (US)
Pages (from-to)23934-23941
Number of pages8
JournalOptics Express
Volume21
Issue number20
DOIs
StatePublished - Oct 7 2013

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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