TY - GEN
T1 - An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement
AU - Zhang, Xiaoyang
AU - Liu, Lin
AU - Liang, Wenxuan
AU - Li, Xingde
AU - Xie, Huikai
PY - 2013
Y1 - 2013
N2 - This paper reports the design, fabrication and characterization of an MEMS scanner with combined electrothermal and electrostatic actuation. The scanner can generate large out-of-plane and in-plane displacement. The out-of-plane displacement is achieved by a pair of electro-thermal bimorph actuators, which is as much as 370 μm at only 2.5 V. The in-plane displacement is obtained by employing electrostatic comb drives, which can achieve fast scan up to 10 kHz. A special process has been developed to fabricate microstructures with both thin-film bimorphs and single-crystal-silicon comb drives.
AB - This paper reports the design, fabrication and characterization of an MEMS scanner with combined electrothermal and electrostatic actuation. The scanner can generate large out-of-plane and in-plane displacement. The out-of-plane displacement is achieved by a pair of electro-thermal bimorph actuators, which is as much as 370 μm at only 2.5 V. The in-plane displacement is obtained by employing electrostatic comb drives, which can achieve fast scan up to 10 kHz. A special process has been developed to fabricate microstructures with both thin-film bimorphs and single-crystal-silicon comb drives.
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U2 - 10.1109/OMN.2013.6659035
DO - 10.1109/OMN.2013.6659035
M3 - Conference contribution
AN - SCOPUS:84892174702
SN - 9781479915125
T3 - International Conference on Optical MEMS and Nanophotonics
SP - 13
EP - 14
BT - Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings
T2 - 2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013
Y2 - 18 August 2013 through 22 August 2013
ER -