A superelastic alloy microgripper with embedded electromagnetic actuators and piezoelectric sensors

Deok Ho Kim, Moon Gu Lee, Byungkyu Kim, Jaehong Shim

Research output: Contribution to journalConference articlepeer-review

4 Scopus citations


This paper presents a superelastic alloy microgripper with integrated electromagnetic actuators and piezoelectric sensors. The design parameters for electromagnetic actuators in the microgripper are selected based on the sensitivity analysis using FEM analysis. For integration of miniature force sensors in the microgripper, the sensor design based on the piezoelectric polymer PVDF film and fabrication process are also presented. Electro discharge machining technology is employed to fabricate the microgripper structure made of superelastic NiTi alloy. The experimental setup is implemented to evaluate the performance of the fabricated force sensors and electromagnetic actuators integrated into the microgripper. Finally, results of finite element computer simulations for electromagnetic actuators and piezoelectric polymer sensors are compared with experimental results.

Original languageEnglish (US)
Article number24
Pages (from-to)230-237
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2004
Externally publishedYes
EventOptomechatronic Micro/Nano Components, Devices, and Systems - Philadelphia, PA, United States
Duration: Oct 27 2004Oct 28 2004


  • Finite element method
  • Force sensing
  • Microgripper
  • Superelastic alloy
  • Voice coil motor (VCM)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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