A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage

Xiaoyang Zhang; Can Duan; Lin Liu; Xingde Li; Huikai Xie

doi:10.1016/j.sna.2015.07.001

A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage

Xiaoyang Zhang, Can Duan, Lin Liu, Xingde Li, Huikai Xie

School of Medicine

Research output: Contribution to journal › Article › peer-review

Abstract

Abstract Scanning fiber tips provides the most convenient way for forward-viewing fiber-optic microendoscopy. In this paper, a distal fiber scanning method based on a large-displacement MEMS actuator is presented. A single-mode fiber is glued on the micro-platform of an electrothermal MEMS stage to realize large range non-resonant scanning. The micro-platform has a large piston scan range of up to 800 μm at only 6 V. The tip deflection of the fiber can be further amplified by placing the MEMS stage at a proper location along the fiber. A quasi-static model of the fiber-MEMS assembly has been developed and validated experimentally. The frequency response has also been studied and measured. A fiber tip deflection of up to 1650 μm for the 45 mm-long movable fiber portion has been achieved when the MEMS electrothermal stage was placed 25 mm away from the free end. The electrothermally-actuated MEMS stage shows a great potential for forward viewing fiber scanning and optical applications.

Original language	English (US)
Article number	9232
Pages (from-to)	239-245
Number of pages	7
Journal	Sensors and Actuators, A: Physical
Volume	233
DOIs	https://doi.org/10.1016/j.sna.2015.07.001
State	Published - Aug 3 2015

Keywords

Distal fiber scanning
Electrothermal actuation
Fiber scanner
Large range
MEMS stage
Micro-platform
Microactuator

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/j.sna.2015.07.001

Cite this

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title = "A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage",

abstract = "Abstract Scanning fiber tips provides the most convenient way for forward-viewing fiber-optic microendoscopy. In this paper, a distal fiber scanning method based on a large-displacement MEMS actuator is presented. A single-mode fiber is glued on the micro-platform of an electrothermal MEMS stage to realize large range non-resonant scanning. The micro-platform has a large piston scan range of up to 800 μm at only 6 V. The tip deflection of the fiber can be further amplified by placing the MEMS stage at a proper location along the fiber. A quasi-static model of the fiber-MEMS assembly has been developed and validated experimentally. The frequency response has also been studied and measured. A fiber tip deflection of up to 1650 μm for the 45 mm-long movable fiber portion has been achieved when the MEMS electrothermal stage was placed 25 mm away from the free end. The electrothermally-actuated MEMS stage shows a great potential for forward viewing fiber scanning and optical applications.",

keywords = "Distal fiber scanning, Electrothermal actuation, Fiber scanner, Large range, MEMS stage, Micro-platform, Microactuator",

author = "Xiaoyang Zhang and Can Duan and Lin Liu and Xingde Li and Huikai Xie",

note = "Funding Information: This work was supported by the National Science Foundation under the award # 1002209 and the National Institutes of Health R01 CA153023 . Device fabrication was done in the Nanoscale Research Facility of the University of Florida. Publisher Copyright: {\textcopyright} 2015 Elsevier B.V.",

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doi = "10.1016/j.sna.2015.07.001",

language = "English (US)",

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AU - Zhang, Xiaoyang

AU - Duan, Can

AU - Liu, Lin

AU - Li, Xingde

AU - Xie, Huikai

N1 - Funding Information: This work was supported by the National Science Foundation under the award # 1002209 and the National Institutes of Health R01 CA153023 . Device fabrication was done in the Nanoscale Research Facility of the University of Florida. Publisher Copyright: © 2015 Elsevier B.V.

PY - 2015/8/3

Y1 - 2015/8/3

N2 - Abstract Scanning fiber tips provides the most convenient way for forward-viewing fiber-optic microendoscopy. In this paper, a distal fiber scanning method based on a large-displacement MEMS actuator is presented. A single-mode fiber is glued on the micro-platform of an electrothermal MEMS stage to realize large range non-resonant scanning. The micro-platform has a large piston scan range of up to 800 μm at only 6 V. The tip deflection of the fiber can be further amplified by placing the MEMS stage at a proper location along the fiber. A quasi-static model of the fiber-MEMS assembly has been developed and validated experimentally. The frequency response has also been studied and measured. A fiber tip deflection of up to 1650 μm for the 45 mm-long movable fiber portion has been achieved when the MEMS electrothermal stage was placed 25 mm away from the free end. The electrothermally-actuated MEMS stage shows a great potential for forward viewing fiber scanning and optical applications.

AB - Abstract Scanning fiber tips provides the most convenient way for forward-viewing fiber-optic microendoscopy. In this paper, a distal fiber scanning method based on a large-displacement MEMS actuator is presented. A single-mode fiber is glued on the micro-platform of an electrothermal MEMS stage to realize large range non-resonant scanning. The micro-platform has a large piston scan range of up to 800 μm at only 6 V. The tip deflection of the fiber can be further amplified by placing the MEMS stage at a proper location along the fiber. A quasi-static model of the fiber-MEMS assembly has been developed and validated experimentally. The frequency response has also been studied and measured. A fiber tip deflection of up to 1650 μm for the 45 mm-long movable fiber portion has been achieved when the MEMS electrothermal stage was placed 25 mm away from the free end. The electrothermally-actuated MEMS stage shows a great potential for forward viewing fiber scanning and optical applications.

KW - Distal fiber scanning

KW - Electrothermal actuation

KW - Fiber scanner

KW - Large range

KW - MEMS stage

KW - Micro-platform

KW - Microactuator

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A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage

Abstract

Keywords

ASJC Scopus subject areas

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