A functional microprobe integrated with sharp tip and huge deflection crank-slider structural cantilever for versatile instrument

Xing Chen, D. W. Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The paper reports a microcantilever-based microprobe that will be applied at a versatile instrument in combination of atomic force microscopy with mass spectrometry. Due to the special requirements for the microprobe, the probe is expected to equip with an in-plane sharp tip for high-resolution image scanning and easy sample electrical extraction, as well as a self-actuated cantilever that owns huge deflection in order to freely switch between two terminals. Therefore, a new concept of new actuation and vibrating mode for cantilevers is presented, where a crank-slider structural cantilever connected to integrated in-plane actuators and a sharp tip are monolithically constructed, serving as a functional microprobe. A newly wet and dry etching hybrid method is introduced to easily fabricate the sharp tip with various aspect ratios. To get big out-of-plane deflection of cantilever, optimized design has been considered and carefully calculated, finally proved by experimental results.

Original languageEnglish (US)
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages1721-1724
Number of pages4
DOIs
StatePublished - Sep 1 2011
Externally publishedYes
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: Jun 5 2011Jun 9 2011

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period6/5/116/9/11

Fingerprint

Dry etching
Wet etching
Image resolution
Mass spectrometry
Aspect ratio
Atomic force microscopy
Actuators
Switches
Scanning

Keywords

  • Huge deflection
  • Microcantilever
  • Microprobe

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Chen, X., & Lee, D. W. (2011). A functional microprobe integrated with sharp tip and huge deflection crank-slider structural cantilever for versatile instrument. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1721-1724). [5969658] https://doi.org/10.1109/TRANSDUCERS.2011.5969658

A functional microprobe integrated with sharp tip and huge deflection crank-slider structural cantilever for versatile instrument. / Chen, Xing; Lee, D. W.

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1721-1724 5969658.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chen, X & Lee, DW 2011, A functional microprobe integrated with sharp tip and huge deflection crank-slider structural cantilever for versatile instrument. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969658, pp. 1721-1724, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 6/5/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969658
Chen X, Lee DW. A functional microprobe integrated with sharp tip and huge deflection crank-slider structural cantilever for versatile instrument. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1721-1724. 5969658 https://doi.org/10.1109/TRANSDUCERS.2011.5969658
Chen, Xing ; Lee, D. W. / A functional microprobe integrated with sharp tip and huge deflection crank-slider structural cantilever for versatile instrument. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. pp. 1721-1724
@inproceedings{fe98e6bb1edd4bf5b433be822b907905,
title = "A functional microprobe integrated with sharp tip and huge deflection crank-slider structural cantilever for versatile instrument",
abstract = "The paper reports a microcantilever-based microprobe that will be applied at a versatile instrument in combination of atomic force microscopy with mass spectrometry. Due to the special requirements for the microprobe, the probe is expected to equip with an in-plane sharp tip for high-resolution image scanning and easy sample electrical extraction, as well as a self-actuated cantilever that owns huge deflection in order to freely switch between two terminals. Therefore, a new concept of new actuation and vibrating mode for cantilevers is presented, where a crank-slider structural cantilever connected to integrated in-plane actuators and a sharp tip are monolithically constructed, serving as a functional microprobe. A newly wet and dry etching hybrid method is introduced to easily fabricate the sharp tip with various aspect ratios. To get big out-of-plane deflection of cantilever, optimized design has been considered and carefully calculated, finally proved by experimental results.",
keywords = "Huge deflection, Microcantilever, Microprobe",
author = "Xing Chen and Lee, {D. W.}",
year = "2011",
month = "9",
day = "1",
doi = "10.1109/TRANSDUCERS.2011.5969658",
language = "English (US)",
isbn = "9781457701573",
pages = "1721--1724",
booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

}

TY - GEN

T1 - A functional microprobe integrated with sharp tip and huge deflection crank-slider structural cantilever for versatile instrument

AU - Chen, Xing

AU - Lee, D. W.

PY - 2011/9/1

Y1 - 2011/9/1

N2 - The paper reports a microcantilever-based microprobe that will be applied at a versatile instrument in combination of atomic force microscopy with mass spectrometry. Due to the special requirements for the microprobe, the probe is expected to equip with an in-plane sharp tip for high-resolution image scanning and easy sample electrical extraction, as well as a self-actuated cantilever that owns huge deflection in order to freely switch between two terminals. Therefore, a new concept of new actuation and vibrating mode for cantilevers is presented, where a crank-slider structural cantilever connected to integrated in-plane actuators and a sharp tip are monolithically constructed, serving as a functional microprobe. A newly wet and dry etching hybrid method is introduced to easily fabricate the sharp tip with various aspect ratios. To get big out-of-plane deflection of cantilever, optimized design has been considered and carefully calculated, finally proved by experimental results.

AB - The paper reports a microcantilever-based microprobe that will be applied at a versatile instrument in combination of atomic force microscopy with mass spectrometry. Due to the special requirements for the microprobe, the probe is expected to equip with an in-plane sharp tip for high-resolution image scanning and easy sample electrical extraction, as well as a self-actuated cantilever that owns huge deflection in order to freely switch between two terminals. Therefore, a new concept of new actuation and vibrating mode for cantilevers is presented, where a crank-slider structural cantilever connected to integrated in-plane actuators and a sharp tip are monolithically constructed, serving as a functional microprobe. A newly wet and dry etching hybrid method is introduced to easily fabricate the sharp tip with various aspect ratios. To get big out-of-plane deflection of cantilever, optimized design has been considered and carefully calculated, finally proved by experimental results.

KW - Huge deflection

KW - Microcantilever

KW - Microprobe

UR - http://www.scopus.com/inward/record.url?scp=80052133414&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80052133414&partnerID=8YFLogxK

U2 - 10.1109/TRANSDUCERS.2011.5969658

DO - 10.1109/TRANSDUCERS.2011.5969658

M3 - Conference contribution

SN - 9781457701573

SP - 1721

EP - 1724

BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

ER -